07271700 is referenced by 5 patents and cites 20 patents.

A thin film resistor device and method of manufacture includes a layer of a thin film conductor material and a current density enhancing layer (CDEL). The CDEL is an insulator material adapted to adhere to the thin film conductor material and enables the said thin film resistor to carry higher current densities with reduced shift in resistance. In one embodiment, the thin film resistor device includes a single CDEL layer formed on one side (atop or underneath) the thin film conductor material. In a second embodiment, two CDEL layers are formed on both sides (atop and underneath) of the thin film conductor material. The resistor device may be manufactured as part of both BEOL and FEOL processes.

Title
Thin film resistor with current density enhancing layer (CDEL)
Application Number
10/906365
Publication Number
7271700 (B2)
Application Date
February 16, 2005
Publication Date
September 18, 2007
Inventor
Ebenezer E Eshun
Highland
NY, US
Anil K Chinthakindi
Wappingers Falls
NY, US
Agent
Lisa U Jaklitsch
Scully Scott Murphy & Presser P C
Assignee
International Business Machines Corporation
NY, US
IPC
H01C 1/012
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