07269343 is referenced by 17 patents and cites 162 patents.

An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear lamps for emitting light energy onto a wafer. The linear lamps can be placed in various configurations. In accordance with the present invention, tuning devices which are used to adjust the overall irradiance distribution of the light energy sources are included in the heating device. The tuning devices can be, for instance, are lamps or lasers.

Title
Heating configuration for use in thermal processing chambers
Application Number
11/132539
Publication Number
7269343 (B2)
Application Date
May 19, 2005
Publication Date
September 11, 2007
Inventor
Arieh A Strod
Cupertino
CA, US
James Tsuneo Taoka
San Jose
CA, US
Rudy Santo Tomas Cardema
San Jose
CA, US
Paul Janis Timans
Mountain View
CA, US
Shuen Chun Choy
San Francisco
CA, US
Conor Patrick O Carroll
Sunnyvale
CA, US
Zion Koren
Sunnyvale
CA, US
Agent
Dority & Manning P A
Assignee
Mattson Technology
CA, US
IPC
C23C 16/00
A21B 2/00
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