07267781 is referenced by 3 patents and cites 29 patents.

A method of fabricating optical filter is disclosed. The method includes providing the substrate and selectively etching the substrate to form a plurality of freestanding layers. A plurality of dielectric layers is disposed over an outer surface of each of the freestanding layers. The resultant optical filters may be used in a variety of applications including etalon applications.

Title
Method of fabricating optical filters
Application Number
10/871689
Publication Number
7267781 (B2)
Application Date
June 2, 2004
Publication Date
September 11, 2007
Inventor
David W Sherrer
Blacksburg
VA, US
Mindaugas F Dautartas
Blacksburg
VA, US
Dan A Steinberg
Blacksburg
VA, US
Agent
Jonathan D Baskin
Assignee
Shipley Company L L C
MA, US
IPC
H01L 21/00
B29D 11/00
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