07258768 is referenced by 31 patents and cites 43 patents.

A plurality of processing chambers are connected to a common chamber (103 in FIG. 1), and they comprehend a processing chamber for oxidation (107), a processing chamber for solution application (108), a processing chamber for baking (109), and processing chambers for vapor-phase film formation (110, 111). Owing to a thin-film forming apparatus of such construction, it is permitted to fabricate an EL (electroluminescence) element employing a high-molecular EL material, without touching the open air. Thus, an EL display device of high reliability can be fabricated.

Title
Method of fabricating an EL display device, and apparatus for forming a thin film
Application Number
10/902792
Publication Number
7258768 (B2)
Application Date
August 2, 2004
Publication Date
August 21, 2007
Inventor
Shunpei Yamazaki
Setagaya
JP
Agent
Robinson Intellectual Property Law Office P C
Eric J Robinson
Assignee
Semiconductor Energy Laboratory
JP
IPC
C23C 14/34
C23C 16/00
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