07239006 is referenced by 3 patents and cites 9 patents.

A structure for resistors and the method for tuning the same. The resistor comprises an electrically conducting region coupled to a liner region. Both the electrically conducting region and the liner region are electrically coupled to first and second contact regions. A voltage difference is applied between the first and second contact regions. As a result, a current flows between the first and second contact regions in the electrically conducting region. The voltage difference and the materials of the electrically conducting region and the liner region are such that electromigration occurs only in the electrically conducting region. As a result, a void region within the electrically conducting region expands in the direction of the flow of the charged particles constituting the current. Because the resistor loses a conducting portion of the electrically conducting region to the void region, the resistance of the resistor is increased (i.e., tuned).

Title
Resistor tuning
Application Number
10/709115
Publication Number
7239006 (B2)
Application Date
April 14, 2004
Publication Date
July 3, 2007
Inventor
Anthony K Stamper
Williston
VT, US
Robert M Rassel
Colchester
VT, US
Ebenezer E Eshun
Essex Junction
VT, US
Douglas D Coolbaugh
Essex Junction
VT, US
Agent
Anthony J Canale
Schmeiser Olsen & Watts
Assignee
International Business Machines Corporation
NY, US
IPC
H01L 29/00
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