07224432 is referenced by 6 patents and cites 13 patents.

A stage device including a movable stage, a plate-like base which supports the stage, and a mass body which moves to cancel a reaction force acting on the base according to a movement of the movable stage. The plate-like base has a plurality of surfaces, and the stage and mass body are supported by different ones of the surfaces of the plate-like base.

Title
Stage device, exposure apparatus, and device manufacturing method
Application Number
11/127292
Publication Number
7224432 (B2)
Application Date
May 12, 2005
Publication Date
May 29, 2007
Inventor
Hideo Tanaka
Utsunomiya
JP
Katsumi Asada
Utsunomiya
JP
Hitoshi Sato
Utsunomiya
JP
Yoshikazu Miyajima
Utsunomiya
JP
Yasuhito Sasaki
Utsunomiya
JP
Agent
Fitzpatrick Cella Harper & Scinto
Assignee
Canon Kabushiki Kaisha
JP
IPC
H02K 41/00
G03B 27/58
G03B 27/42
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