07213963 is referenced by 128 patents and cites 78 patents.

A lithographic projection apparatus is disclosed in which a space between the projection system and a sensor is filled with a liquid.

Title
Lithographic apparatus and device manufacturing method
Application Number
10/857614
Publication Number
7213963 (B2)
Application Date
June 1, 2004
Publication Date
May 8, 2007
Inventor
Helmar Van Santen
Amsterdam
NL
Bob Streefkerk
Tilburg
NL
Alexander Straaijer
Eindhoven
NL
Joost Jeroen Ottens
Veldhoven
NL
Johannes Catharinus Hubertus Mulkens
Waalre
NL
Jeroen Johannes Sophia Maria Mertens
Duizel
NL
Hendricus Johannes Maria Meijer
Veldhoven
NL
Erik Roelof Loopstra
Heeze
NL
Mark Kroon
Utrecht
NL
Aleksey Yurievich Kolesnychenko
Helmond
NL
Marcus Adrianus Van de Kerkhof
Helmond
NL
Christiaan Alexander Hoogendam
Veldhoven
NL
Sjoerd Nicolaas Lambertus Donders
s-Hertogenbosch
NL
Hans Butler
Best
NL
Arie Jeffrey Maria Den Boef
Waalre
NL
Joannes Theodoor De Smit
Eindhoven
NL
Klaus Simon
Eindhoven
NL
Timotheus Franciscus Sengers
s-Hertogenbosch
NL
Frank Van Schaik
Eindhoven
NL
Roelof Aeilko Siebrand Ritsema
Eindhoven
NL
Erik Theodorus Maria Bijlaart
Rosmalen
NL
Joeri Lof
Eindhoven
NL
Agent
Pillsbury Winthrop Shaw Pittman
Assignee
ASML Netherlands
NL
IPC
G00B 1/00
G03B 27/32
G03B 27/72
G03B 27/74
G03B 27/42
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