07212275 is referenced by 18 patents and cites 15 patents.

A laser apparatus that includes a laser light generation section, an optical amplification section, a wavelength conversion section and a suppressing section is provided. The laser light generation section includes a single wavelength oscillatory laser and generates pulsed light having a single wavelength within a wavelength range ranging from about 1.51 to 1.59 μm. The optical amplification section includes an optical fiber amplifier and is optically connected to the laser light generation section to amplify the pulsed light. The wavelength conversion section includes a nonlinear optical crystal and is optically connected to the optical amplification section to perform wavelength conversion of the amplified pulsed light into ultraviolet light. The suppressing section suppresses expansion of a wavelength width of light originated in a nonlinear effect of an optical element between the single wavelength oscillatory laser and the wavelength conversion section.

Title
Exposure apparatus with laser device
Application Number
11/111828
Publication Number
7212275 (B2)
Application Date
April 22, 2005
Publication Date
May 1, 2007
Inventor
Tomoko Ohtsuki
Allentown
PA, US
Agent
Oliff & Berridge
Assignee
Nikon Corporation
JP
IPC
G02F 1/35
G03B 27/72
G03B 27/54
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