07199858 is referenced by 241 patents and cites 88 patents.

A lithographic projection apparatus is disclosed in which a space between the projection system and the substrate is filled with a liquid. An edge seal member at least partly surrounds the substrate or other object on a substrate table to prevent liquid loss when edge portions of the substrate or other object are, for example, imaged or illuminated.

Title
Lithographic apparatus and device manufacturing method
Application Number
10/705804
Publication Number
7199858 (B2)
Application Date
November 12, 2003
Publication Date
April 3, 2007
Inventor
Helmar Van Santen
Amsterdam
NL
Bob Streefkerk
Tilburg
NL
Alexander Straaijer
Eindhoven
NL
Joannes Theodoor De Smit
Eindhoven
NL
Klaus Simon
Eindhoven
NL
Timotheus Franciscus Sengers
's-Hertogenbosch
NL
Frank Van Schaik
Eindhoven
NL
Roelof Aeilko Siebrand Ritsema
Eindhoven
NL
Johannes Catharinus Hubertus Mulkens
Maastricht
NL
Jeroen Johannes Sophia Maria Mertens
Duizel
NL
Hendricus Johannes Maria Meijer
Veldhoven
NL
Erik Roelof Loopstra
Heeze
NL
Aleksey Yurievich Kolesnychenko
Helmond
NL
Christiaan Alexander Hoogendam
Veldhoven
NL
Sjoerd Nicolaas Lambertus Donders
's-Hertogenbosch
NL
Hans Butler
Best
NL
Erik Theodorus Maria Bijlaart
Rosmalen
NL
Joeri Lof
Eindhoven
NL
Agent
Pillsbury Winthrop Shaw Pittman
Assignee
ASML Netherlands
NL
IPC
G03B 27/52
G03B 24/42
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