07187188 is referenced by 81 patents and cites 580 patents.

An improved chuck with lift pins within a probe station.

Title
Chuck with integrated wafer support
Application Number
10/927247
Publication Number
7187188 (B2)
Application Date
August 26, 2004
Publication Date
March 6, 2007
Inventor
John Dunklee
Tigard
OR, US
Brad Froemke
Portland
OR, US
Peter Andrews
Beaverton
OR, US
Agent
Chernoff Vilhauer McClung & Stenzel
Assignee
Cascade Microtech
OR, US
IPC
G01R 31/26
G01R 31/02
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