07158280 is referenced by 15 patents and cites 29 patents.

The present invention relates to methods and systems that define feature boundaries in a radiation sensitive medium on a workpiece using a diffraction-type micromirror array, extending to production of patterns and structures on a semiconductor substrate. Workpieces include lithographic masks, integrated circuits and other electronic and optical devices. Particular aspects of the present invention are described in the claims, specification and drawings.

Title
Methods and systems for improved boundary contrast
Application Number
11/272925
Publication Number
7158280 (B2)
Application Date
November 14, 2005
Publication Date
January 2, 2007
Inventor
Torbjörn Sandström
Pixbo
SE
Agent
Haynes Beffel & Wolfeld
Ernest J Beffel Jr
Assignee
Micronic Laser Systems
SE
IPC
G01B 11/14
G01B 11/26
G02B 6/42
G02B 26/08
G02B 26/00
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