07145132 is referenced by 16 patents and cites 20 patents.

A debris trapping system for trapping debris particles released with the generation of radiation by a radiation source in a lithographic apparatus includes first and second sets of channels. Each channel of the first set enables radiation from a radiating source to propagate therethrough and has an inner wall for catching debris particles. The second set of channels is situated downstream of the first set with respect to a propagation direction of the radiation. Each channel of the second set enables radiation from the radiating source to also propagate therethrough and has an inner wall for catching debris particles. A gas supply and a gas exhaust are configured to provide between the first set and the second set of channels a gas flow having a net flow direction substantially across the propagation direction of the radiation from a radiating source.

Title
Lithographic apparatus, illumination system and debris trapping system
Application Number
11/20674
Publication Number
7145132 (B2)
Application Date
December 27, 2004
Publication Date
December 5, 2006
Inventor
Maarten Marinus Johannes Wilhelmus Van Herpen
Heesch
NL
Derk Jan Wilfred Klunder
Nljverdal
NL
Levinus Pieter Bakker
Helmond
NL
Agent
Pillsbury Winthrop Shaw Pittman
Assignee
ASML Netherlands
NL
IPC
G03B 27/52
H01S 1/00
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