07141488 is referenced by 8 patents and cites 35 patents.

Germanium compounds suitable for use as vapor phase deposition precursors for germanium films are provided. Methods of depositing films containing germanium using such compounds are also provided. Such germanium films are particularly useful in the manufacture of electronic devices.

Title
Method of depositing germanium-containing films
Application Number
10/816356
Publication Number
7141488 (B2)
Application Date
April 2, 2004
Publication Date
November 28, 2006
Inventor
Deodatta Vinayak Shenai Khatkhate
Danvers
MA, US
Egbert Woelk
North Andover
MA, US
Agent
S Matthew Cairns
Assignee
Rohm and Haas Electronic Materials
MA, US
IPC
H01L 21/205
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