07138813 is referenced by 14 patents and cites 511 patents.

To reduce noise in measurements obtained by probing a device supported on surface of a thermal chuck in a probe station, a conductive member is arranged to intercept current coupling the thermal unit of the chuck to the surface supporting the device. The conductive member is capacitively coupled to the thermal unit but free of direct electrical connection thereto.

Title
Probe station thermal chuck with shielding for capacitive current
Application Number
10/626903
Publication Number
7138813 (B2)
Application Date
July 25, 2003
Publication Date
November 21, 2006
Inventor
John L Dunklee
Tigard
OR, US
Paul A Tervo
Vancouver
WA, US
Clarence E Cowan
Newberg
OR, US
Agent
Chernoff Vilhauer McClung & Stenzel
Assignee
Cascade Microtech
OR, US
IPC
G01R 31/28
G01R 31/26
G01R 31/02
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