07116394 is referenced by 16 patents and cites 14 patents.

A cleaning system for removing contamination from at least a part of a surface of a component in a lithographic projection apparatus is disclosed. The cleaning system includes an electric field generator that generates an electric field to provide cleaning particles near the surface of the component.

Title
Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system
Application Number
10/738976
Publication Number
7116394 (B2)
Application Date
December 19, 2003
Publication Date
October 3, 2006
Inventor
Wolfgang Singer
Aalen
DE
Johann Trenkler
Schwaebisch Gmuend
DE
Markus Weiss
Aalen
DE
Bastiaan Matthias Mertens
Den Haag
NL
Ralph Kurt
Eindhoven
NL
Levinus Pieter Bakker
Helmond
NL
Agent
Pillsbury Winthrop Shaw Pittman
Assignee
Carl Zeiss SMT
DE
ASML Netherlands
NL
IPC
G03B 27/42
G03B 27/52
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