07110158 is referenced by 204 patents and cites 283 patents.

An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.

Title
Photonic MEMS and structures
Application Number
10/224029
Publication Number
7110158 (B2)
Application Date
August 19, 2002
Publication Date
September 19, 2006
Inventor
Mark W Miles
San Francisco
CA, US
Agent
Knobbe Martens Olson & Bear
Assignee
IDC
CA, US
IPC
G02B 26/00
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