07109731 is referenced by 30 patents and cites 407 patents.

A membrane probing assembly includes a support element having an incompressible forward support tiltably coupled to a rearward base and a membrane assembly, formed of polyimide layers, with its central region interconnected to the support by an elastomeric layer. Flexible traces form data/signal lines to contacts on the central region. Each contact comprises a rigid beam and a bump located in off-centered location on the beam, which bump includes a contacting portion. After initial touchdown of these contacting portions, further over-travel of the pads causes each beam to independently tilt locally so that different portions of each beam move different distances relative to the support thus driving each contact into lateral scrubbing movement across the pad thereby clearing away oxide buildup. The elastomeric member backed by the incompressible support ensures sufficient scrub pressure and reliable tilt recovery of each contact without mechanical straining of the beam. In an alternative embodiment, the contacts comprise conductive beams each supported on a loose U-shaped flap formed in the membrane assembly where each flap and beam is tiltably supported in inclined position by an elastomeric hub interposed between the flap and support.

Title
Membrane probing system with local contact scrub
Application Number
11/155986
Publication Number
7109731 (B2)
Application Date
June 17, 2005
Publication Date
September 19, 2006
Inventor
Mike Bayne
Vancouver
WA, US
Kenneth R Smith
Portland
OR, US
K Reed Gleason
Portland
OR, US
Agent
Chernoff Vilhauer McClung & Stenzel
Assignee
Cascade Microtech
OR, US
IPC
G01R 31/06
View Original Source