07109482 is referenced by 4 patents and cites 174 patents.

A scanning probe microscope system (100) includes an objective lens (147), a clamping circuit (404), a tip deflection measurement circuit (421), a cantilever (136), and a probe (137) for modifying and inspecting an object (102) disposed on a stage (129).

Title
Object inspection and/or modification system and method
Application Number
10/875151
Publication Number
7109482 (B2)
Application Date
June 22, 2004
Publication Date
September 19, 2006
Inventor
Victor B Kley
Berkeley
CA, US
Agent
Townsend and Townsend and Crew
Assignee
General Nanotechnology
CA, US
IPC
G01B 21/30
View Original Source