07078671 is referenced by 3 patents and cites 24 patents.

An optical microbench configured to facilitate wafer-level testing of optoelectronic devices is provided. The optical microbench includes an optoelectronic device mounted to a wafer in which the optical microbench is provided. The optical microbench also includes a beam deflector provided in the wafer and disposed along the optical path of the optoelectronic device. The beam deflector is configured to deflect a portion of the optical path to lie along a direction oriented out of the plane of the wafer. The optical microbench further includes an optical feed-through disposed along the optical path between the optoelectronic device and the beam deflector. The optical feed-through is configured to conduct an optical signal between the beam deflector and the optoelectronic device. A method for testing optoelectronic devices at the wafer level is also provided.

Title
Silicon optical microbench devices and wafer-level testing thereof
Application Number
10/214433
Publication Number
7078671 (B1)
Application Date
August 6, 2002
Publication Date
July 18, 2006
Inventor
David W Sherrer
Blacksburg
VA, US
Agent
Jonathan D Baskin
Assignee
Shipley Company L L C
MA, US
IPC
H01J 3/14
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