07061226 is referenced by 44 patents and cites 32 patents.

The present invention relates to a method to detect at least one defective pixel in a spatial light modulator comprising numerous pixel elements. The spatial light modulator is imaged to a detector. A relayed image of a first chess-board pattern of pixels in said spatial light modulator is detected by said detector. A relayed image of a second chess-board pattern of pixels in said spatial light modulator is detected, which is inverted to the first chessboard pattern, by said detector. The relayed images of said first and second chessboard patterns are analyzed to detect differences between said detected images and theoretical images thereof.

Title
Method to detect a defective element
Application Number
10/757351
Publication Number
7061226 (B2)
Application Date
January 14, 2004
Publication Date
June 13, 2006
Inventor
Peter Dürr
Dresden
DE
Agent
Haynes Beffel & Wolfeld
Ernest J Beffel Jr
Assignee
Micronic Laser Systems
SE
IPC
G01R 13/20
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