07045780 is referenced by 24 patents and cites 172 patents.

A scanning probe microscopy (SPM) inspection and/or modification system which uses SPM technology and techniques. The system includes various types of microstructured SPM probes for inspection and/or modification of the object. The components of the SPM system include microstructured calibration structures. A probe may be defective because of wear or because of fabrication errors. Various types of reference measurements of the calibration structure are made with the probe or vice versa to calibrate it. The components of the SPM system further include one or more tip machining structures. At these structures, material of the tips of the SPM probes may be machined by abrasively lapping and chemically lapping the material of the tip with the tip machining structures.

Title
Scanning probe microscopy inspection and modification system
Application Number
10/616453
Publication Number
7045780 (B2)
Application Date
July 8, 2003
Publication Date
May 16, 2006
Inventor
Victor B Kley
Berkeley
CA, US
Agent
Townsend and Townsend and Crew
Assignee
General Nanotechnology
CA, US
IPC
G21K 7/00
G01N 23/00
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