07034308 is referenced by 19 patents and cites 31 patents.

A radiation system includes a contamination barrier, e.g., a foil trap, between a collector, for example a normal incidence collector, and a radiation source, such that radiation coming from the source passes the foil trap twice. The radiation passes the contamination barrier once before hitting the collector and a second time after reflection by the collector. The foil trap includes lamellas that are parallel to both the radiation coming from the light source, and to the radiation reflected by the collector. The radiation is thus not obstructed by the foil trap. In this way, a normal incidence collector, which is used with a plasma produced source, can be protected from debris coming from a EUV source.

Title
Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby
Application Number
10/873646
Publication Number
7034308 (B2)
Application Date
June 23, 2004
Publication Date
April 25, 2006
Inventor
Yurii Victorovitch Sidelnikov
Moscow Region
RU
Frank Jeroen Pieter Schuurmans
Valkenswaard
NL
Ralph Kurt
Eindhoven
NL
Vadim Yevgenyevich Banine
Helmond
NL
Levinus Pieter Bakker
Helmond
NL
Agent
Pillsbury Winthrop Shaw Pittman
Assignee
ASML Netherlands
NL
IPC
G03B 27/52
G03F 7/20
G21G 5/00
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