07023610 is referenced by 199 patents and cites 20 patents.

An ultraviolet laser apparatus having a single-wavelength oscillating laser generating laser light between an infrared band and a visible band, an optical amplifier for amplifying the laser light, and a wavelength converting portion converting the amplified laser light into ultraviolet light using a non-linear optical crystal. An exposure apparatus transfers a pattern image of a mask onto a substrate and includes a light source having a laser apparatus emitting laser light having a single wavelength, a first fiber optical amplifier for amplifying the laser light, a light dividing device for dividing or branching the amplified laser light into plural lights, and second fiber optical amplifiers for amplifying the plural divided or branched lights, respectively, and a transmission optical system for transmitting the laser light emitted from the light source to the exposure apparatus.

Title
Ultraviolet laser apparatus and exposure apparatus using same
Application Number
10/367863
Publication Number
7023610 (B2)
Application Date
February 19, 2003
Publication Date
April 4, 2006
Inventor
Soichi Owa
Tokyo
JP
Tomoko Ohtsuki
Macungie
PA, US
Agent
Westerman Hattori Daniels & Adrian
Assignee
Nikon Corporation
JP
IPC
H01S 3/109
G02F 1/35
G02F 1/37
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