07018678 is referenced by 31 patents and cites 25 patents.

Methods for depositing uniform, pinhole-defect free organic polysilica coatings are provided. These methods allow for the use of these materials as spin-on cap layers in the manufacture of integrated circuits.

Title
Electronic device manufacture
Application Number
10/453337
Publication Number
7018678 (B2)
Application Date
June 3, 2003
Publication Date
March 28, 2006
Inventor
Timothy G Adams
Sudbury
MA, US
Gregory P Prokopowicz
Lancaster
MA, US
Jeffrey M Calvert
Acton
MA, US
Michael K Gallagher
Hopkinton
MA, US
Dana A Gronbeck
Holliston
MA, US
Agent
S Matthew Cairns
Assignee
Shipley Company L L C
MA, US
IPC
B05D 3/02
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