07015503 is referenced by 101 patents and cites 20 patents.

Display devices such as EL elements or LED elements, or color filters, are provided, wherewith, when forming thin films such as organic semiconductor films or colored resins, there is remarkably little variation in film thickness from pixel to pixel. A method for fabricating thin film elements having banks of a prescribed height and a thin film layer formed by an ink jet method in areas to be coated that are partitioned by those banks is disclosed. Furthermore, banks are formed of an organic material on a bank formation surface configured of an inorganic material, plasma treatment is performed under conditions that the induction gas is fluorine-based and that fluorine is present excessively, and the areas enclosed by the banks subjected to surface treatment are filled with the liquid thin film material to form the thin film layer or layers.

Title
Method of forming thin film patterning substrate including formation of banks
Application Number
10/686634
Publication Number
7015503 (B2)
Application Date
October 17, 2003
Publication Date
March 21, 2006
Inventor
Hiroo Miyajima
Matsumoto
JP
Ichio Yudasaka
Chino
JP
Hiroshi Kiguchi
Suwa
JP
Shunichi Seki
Suwa
JP
Agent
Oliff & Berridge
Assignee
Seiko Epson Corporation
JP
IPC
H01L 51/00
View Original Source