07015144 is referenced by 5 patents and cites 18 patents.

Compositions that can be used in semiconductor manufacturing processes, comprising perhydro-polysilazane having a weight average molecular weight of about 300 to about 3,000 and a polydispersity index of about 1.8 to about 3.0 are provided. Solutions comprising the compositions of the present invention, methods of forming films in a semiconductor manufacturing process, and methods of manufacturing semiconductor devices are also provided.

Title
Compositions including perhydro-polysilazane used in a semiconductor manufacturing process and methods of manufacturing semiconductor devices using the same
Application Number
10/776823
Publication Number
7015144 (B2)
Application Date
February 11, 2004
Publication Date
March 21, 2006
Inventor
Hong Gun Kim
Gyeonggi-do
KR
Juseon Goo
Gyeonggi-do
KR
Kyutae Na
Gyeonggi-do
KR
Eunkee Hong
Gyeonggi-do
KR
Agent
Myers Bigel Sibley & Sajovec
Assignee
Samsung Electronics
KR
IPC
H01L 21/469
H01L 21/31
H01L 21/311
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