06977461 is referenced by 8 patents and cites 9 patents.

A piezo actuator system, is presented herein. A piezo actuator system comprises a number of piezo actuators which may lengthen and shear. Using the lengthening and shearing, the piezo actuator system grips and moves an object in response to a first and a second control signal, respectively. The possible displacement of the object is limited by the maximum shear of the piezo actuators. To increase the possible displacement, the piezo actuators may be controlled to perform a linear shear sequence or a shuffle sequence. During the linear shear sequence, the object is moved; during the shuffle sequence the object is substantially stationary, while the piezo actuators are repositioned with respect to the object, after which the object may be moved further using the linear shear sequence. A piezo actuator system may be adapted to perform a slow shuffle sequence, being a relatively slowly performed shuffle sequence, during which the linear shear sequence may be performed simultaneously, preventing any dead time during movement.

Title
System and method for moving an object employing piezo actuators
Application Number
10/735605
Publication Number
6977461 (B2)
Application Date
December 15, 2003
Publication Date
December 20, 2005
Inventor
Gerardus Jacobus Cornelis Catharina Maria Leenheers
Hertogenbosch
NL
Thomas Augustus Mattaar
Veldhoven
NL
Stefan Gertrud Marie Hendriks
Eindhoven
NL
Agent
Pillsbury Winthrop Shaw Pittman
Assignee
ASML Netherlands
NL
IPC
H01L 041/08
View Original Source