06947123 is referenced by 23 patents and cites 13 patents.

An exposure apparatus has a light source comprising a laser device that is small and easy to maintain. The laser device comprises a laser oscillator for generating a single-wavelength laser beam (LB3) within a wavelength range including infrared and visible regions; an optical amplifier (18) for amplifying a laser beam (LB3); and a wavelength converter for converting the amplified laser beam into ultraviolet light using a nonlinear optical crystal. The optical amplifier (18) includes a plurality of stages of optical fiber amplifiers (22, 25) for sequential amplification of the laser beam (LB3), and a narrow-band filter (24A) and an isolator (IS3) arranged between optical fiber amplifiers.

Title
Exposure device with laser device
Application Number
10/70682
Publication Number
6947123 (B1)
Application Date
September 8, 2000
Publication Date
September 20, 2005
Inventor
Tomoko Ohtsuki
Allentown
PA, US
Agent
Oliff & Berridge
Assignee
Nikon Corporation
JP
IPC
G02F 001/35
G03B 027/72
G03B 027/54
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