06927586 is referenced by 64 patents and cites 27 patents.

An improved vertical pin probing device is constructed with a housing with spaced upper and lower spacers of a metal alloy, each having a thin sheet of silicon nitride ceramic material held in a window in the spacer of adhesive. The spacers may be composed of foils adhered to one another in a laminated structure. The sheets of silicon nitride have laser-drilled matching patterns of holes supporting probe pins and insulating the probe pins from the housing. The spacers and silicon nitride ceramic sheets have coefficients of thermal expansion closely matching that of the silicon chip being probed, so that the probing device compensates for temperature variations over a large range of probing temperatures.

Title
Temperature compensated vertical pin probing device
Application Number
10/411737
Publication Number
6927586 (B2)
Application Date
April 11, 2003
Publication Date
August 9, 2005
Inventor
William F Thiessen
Newtown
CT, US
Agent
Gregory S Rosenblatt
Anthony P Gangemi
Wiggin and Dana
Assignee
Wentworth Laboratories
CT, US
IPC
G01R 031/02
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