06924882 is referenced by 1 patents and cites 61 patents.

A balanced positioning system for use in lithographic apparatus having a pair of balance masses which are supported so as to be moveable in at least one degree of freedom, such as Y translation. Oppositely directed drive forces in this degree of freedom act directly between the driven body and the balance masses to rotate the driven body about an axis perpendicular to the one direction. Reaction forces arising from positioning movements result in linear movements of the balance masses and all reaction forces are kept within the balanced positioning system.

Title
Balanced positioning system for use in lithographic apparatus
Application Number
10/649608
Publication Number
6924882 (B2)
Application Date
August 28, 2003
Publication Date
August 2, 2005
Inventor
Yim Bun P Kwan
Eindhoven
NL
Agent
Pillsbury Winthrop Shaw Pittman
Assignee
ASML Netherlands
NL
IPC
G03B 027/62
G03B 027/58
G03B 027/42
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