06921963 is referenced by 223 patents and cites 20 patents.

A narrow channel FinFET is described herein with a narrow channel width. A protective layer may be formed over the narrow channel, the protective layer being wider than the narrow channel.

Title
Narrow fin FinFET
Application Number
10/830006
Publication Number
6921963 (B2)
Application Date
April 23, 2004
Publication Date
July 26, 2005
Inventor
Bin Yu
Cupertino
CA, US
Haihong Wang
Fremont
CA, US
Srikanteswara Dakshina Murthy
Austin
TX, US
Judy Xilin An
San Jose
CA, US
Zoran Krivokapic
Santa Clara
CA, US
Agent
Harrity & Snyder
Assignee
Advanced Micro Devices
CA, US
IPC
H01L 029/06
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