06918104 is referenced by 189 patents and cites 87 patents.

Techniques for fabricating a device include forming a fabrication layout, such as a mask layout, for a physical design layer, such as a design for an integrated circuit, and identifying evaluation points on an edge of a polygon corresponding to the design layer for correcting proximity effects. Techniques include correcting for proximity effects associated with an edge in a first fabrication layout by determining whether any portion of the edge corresponds to a target edge in a design layer. The first fabrication layout corresponds to the design layer that indicates target edges for a printed features layer. If any portion of the edge corresponds to the target edge, then it is determined whether to establish an evaluation point on the edge. Then it is determined how to correct the edge for proximity effects based on the evaluation point. In case it is determined that no portion of the edge corresponds to the target edge, then no evaluation point is selected on the edge.

Title
Dissection of printed edges from a fabrication layout for correcting proximity effects
Application Number
10/346903
Publication Number
6918104 (B2)
Application Date
January 17, 2003
Publication Date
July 12, 2005
Inventor
Youping Zhang
Newark
CA, US
Christophe Pierrat
Santa Clara
CA, US
Agent
Jeanette S Harms
Beyer Hoffman & Harms
Assignee
Synopsys
CA, US
IPC
G03C 005/00
G06F 017/50
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