06908812 is referenced by 31 patents and cites 16 patents.

A phase change material memory cell may be formed with singulated, cup-shaped phase change material. The interior of the cup-shaped phase change material may be filled with a thermal insulating material. As a result, heat losses upwardly through the phase change material may be reduced and adhesion problems between the phase change material and the rest of the device may likewise be reduced in some embodiments. In addition, a barrier layer may be provided between the upper electrode and the remainder of the device that may reduce species incorporation from the top electrode into the phase change material, in some embodiments. Chemical mechanical planarization may be utilized to define the phase change material reducing the effects of phase change material dry etching in some embodiments.

Title
Phase change material memory device
Application Number
10/426380
Publication Number
6908812 (B2)
Application Date
April 30, 2003
Publication Date
June 21, 2005
Inventor
Tyler A Lowrey
San Jose
CA, US
Agent
Trop Pruner & Hu P C
Assignee
Intel Corporation
CA, US
IPC
H01L 021/00
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