06908724 is referenced by 14 patents and cites 67 patents.

There is provided a novel fluorine-containing polymer having an acid-reactive group which has a high transparency against energy rays (radioactive rays) in a vacuum ultraviolet region (157 nm), and further there are provided a material for fluorine-containing base polymer prepared from the polymer and suitable for a photoresist and a chemically amplifying type resist composition obtained therefrom. The polymer has a number average molecular weight of from 1,000 to 1,000,000 and represented by the formula: —(M1)—(M2)—(A)—, wherein M1 is a structural unit having an acid-labile or acid-degradable functional group, M2 is a structural unit of fluorine-containing acryl ester, A is a structural unit derived from other copolymerizable monomer, the percent by mole ratio M1/M2 is 1 to 99/99 to 1 and the polymer comprises from 1 to 99% by mole of the structural unit M1, from 1 to 99% by mole of the structural unit M2 and from 0 to 98% by mole of the structural unit A1. The material for fluorine-containing base polymer comprises a fluorine-containing polymer having an acid-reactive group such as the above-mentioned polymer and is suitable for a photoresist, and the chemically amplifying type resist composition is obtained from those polymer and material.

Title
Fluorine-containing polymer having acid-reactive group and chemically amplifying type photoresist composition prepared from same
Application Number
10/262893
Publication Number
6908724 (B2)
Application Date
October 3, 2002
Publication Date
June 21, 2005
Inventor
Tetsuo Shimizu
Settsu
JP
Hirokazu Aoyama
Settsu
JP
Takuji Ishikawa
Settsu
JP
Yoshito Tanaka
Settsu
JP
Meiten Koh
Settsu
JP
Takayuki Araki
Settsu
JP
Agent
Sughrue Mion PLLC
Assignee
Daikin
JP
IPC
G03F 007/039
G03F 007/004
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