06881994 is referenced by
254 patents and cites 197 patents.
There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.
Monolithic three dimensional array of charge storage devices containing a planarized surface
August 13, 2001
April 19, 2005
Brad Herner Palo Alto CA, US Paul Michael Farmwald Portola Valley CA, US Mark G Johnson Los Altos CA, US Igor G Kouznetzov Santa Clara CA, US Christopher J Petti Mountain View CA, US Andrew J Walker Mountain View CA, US James M Cleeves Redwood City CA, US Vivek Subramanian Redwood City CA, US Thomas H Lee Cupertino CA, US
Foley & Lardner
Matrix Semiconductor CA, US
H01L 021/8242 H01L 031/119 H01L 029/94 H01L 029/76 H01L 027/108