06881994 is referenced by 254 patents and cites 197 patents.

There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.

Title
Monolithic three dimensional array of charge storage devices containing a planarized surface
Application Number
9/927648
Publication Number
6881994 (B2)
Application Date
August 13, 2001
Publication Date
April 19, 2005
Inventor
Brad Herner
Palo Alto
CA, US
Paul Michael Farmwald
Portola Valley
CA, US
Mark G Johnson
Los Altos
CA, US
Igor G Kouznetzov
Santa Clara
CA, US
Christopher J Petti
Mountain View
CA, US
Andrew J Walker
Mountain View
CA, US
James M Cleeves
Redwood City
CA, US
Vivek Subramanian
Redwood City
CA, US
Thomas H Lee
Cupertino
CA, US
Agent
Foley & Lardner
Assignee
Matrix Semiconductor
CA, US
IPC
H01L 021/8242
H01L 031/119
H01L 029/94
H01L 029/76
H01L 027/108
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