06873026 is referenced by 16 patents and cites 15 patents.

A composition comprises a first component that provides a predetermined response to radiation, and a second component. Upon curing of the composition, portions of the first component bind together portions of the second component to form an inhomogeneous material having physical properties substantially determined by the second component. The function provided by the first component's response to radiation and the macroscopic properties determined by the second component are largely decoupled and thus may be separately optimized. Some embodiments provide photo-patternable low dielectric constant materials that may be advantageously employed in metal interconnect layers in integrated circuits, for example.

Title
Inhomogeneous materials having physical properties decoupled from desired functions
Application Number
10/92201
Publication Number
6873026 (B1)
Application Date
March 4, 2002
Publication Date
March 29, 2005
Inventor
Robert H Havemann
Pleasanton
CA, US
Justin F Gaynor
San Jose
CA, US
Archita Sengupta
San Jose
CA, US
Paul E Brunemeier
Sunnyvale
CA, US
Agent
Silicon Valley Patent Group
Assignee
Novellus Systems
CA, US
IPC
H01L 021/30
H01L 021/30
H01L 021/30
C08J 003/28
H01B 003/46
H01K 001/02
View Original Source