06853443 is referenced by 65 patents and cites 9 patents.

A first main body unit for supporting a substrate stage is supported at four points by vibration isolators, and a second main body unit is supported on the first main body unit at three points by second vibration isolators. This allows the first main body unit and the substrate stage to be supported stably with high rigidity, and for example, allows maintenance on the stage portion from the back side of the apparatus, which is not possible with the first main body unit supported at three points. Further, the apparatus comprises vibration isolation units connected in series in two platforms, which has a great effect of suppressing background vibration from the floor surface. Accordingly, exposure with high precision can be performed which improves the yield of devices, and the reduced maintenance time can improve the operation rate, consequently leading to an improvement in productivity of devices as end products.

Title
Exposure apparatus, substrate processing system, and device manufacturing method
Application Number
10/310036
Publication Number
6853443 (B2)
Application Date
December 5, 2002
Publication Date
February 8, 2005
Inventor
Kenji Nishi
Yokohama
JP
Agent
Oblon Spivak McClelland Maier & Neustadt P C
Assignee
Nikon Corporation
JP
IPC
G03B 027/62
G03B 027/58
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