06794119 is referenced by 538 patents.

The invention provides a microfabrication process which may be used to manufacture a MEMS device. The process comprises depositing one or a stack of layers on a base layer, said one layer or an uppermost layer in said stack of layers being a sacrificial layer; patterning said one or a stack of layers to provide at least one aperture therethrough through which said base layer is exposed; depositing a photosensitive layer over said one or a stack of layers; and passing light through said at least one aperture to expose said photosensitive layer.

Title
Method for fabricating a structure for a microelectromechanical systems (MEMS) device
Application Number
10/74562
Publication Number
6794119 (B2)
Application Date
February 12, 2002
Publication Date
September 21, 2004
Inventor
Mark W Miles
San Francisco
CA, US
Agent
Blakely Sokoloff Taylor & Zafman
US
Assignee
Iridigm Display Corporation
CA, US
IPC
G03F 7/00
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