06781672 is referenced by 10 patents and cites 2 patents.

An exposure apparatus, wherein light emitted from a relatively low output light source is selectively transmitted by a light path switching controller and mirrors to exposure units, amplifiers are provided near the exposure units, and the light from the light source is amplified there and then sent to the corresponding exposure units.

Title
Exposure apparatus and illumination apparatus
Application Number
10/223622
Publication Number
6781672 (B2)
Application Date
August 20, 2002
Publication Date
August 24, 2004
Inventor
Kiyoshi Motegi
Yokohama
US
Agent
Oliff & Berridge
US
Assignee
Nikon Corporation
US
IPC
G03B 27/72
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