06778257 is referenced by 424 patents and cites 2 patents.

An imaging apparatus according to one embodiment of the invention includes a programmable patterning structure configured to pattern a projection beam of radiation according to a desired pattern. The programmable patterning structure includes a plurality of separate patterning sub-elements, each sub-element being configured to generate a patterned sub-beam. At least one of the separate patterning sub-elements is configured to generate a patterned sub-beam whose cross-section contains regions of different intensities. The imaging apparatus also includes a combining structure configured to combine the plurality of patterned sub-beams into a single patterned image, and a projection system configured to project the patterned image onto a target portion of a substrate.

Title
Imaging apparatus
Application Number
10/200577
Publication Number
6778257 (B2)
Application Date
July 23, 2002
Publication Date
August 17, 2004
Inventor
Huibert Visser
Zevenhuizen
US
Karel Diederick Van Der Mast
Helmond
US
Bart Snijders
Rotterdam
US
Stanislav Smirnov
Bethel
CT, US
Lev Sakin
Stamford I
CT, US
Lev Ryzhikov
Norwalk
CT, US
Mark Oskotsky
Mamaroneck
NY, US
Matthew Eugene McCarthy
Brookfield
CT, US
Borgert Kruizinga
Zoetermer
US
Jason Douglas Hintersteiner
Bethel
CT, US
Pieter Willem Herman De Jager
Rotterdam
US
Arno Jan Bleeker
Westerhoven
US
Agent
Pillsbury Winthrop
US
Assignee
ASML Netherlands
US
IPC
G03B 27/54
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