06752966 is referenced by 88 patents and cites 2 patents.

Microfabrication methods and devices in which microscale structural elements are provided in an intermediate polymer layer between two planar substrates. Preferred aspects utilize photoimagable or ablatable polymer layers as the intermediate polymer layer.

Title
Microfabrication methods and devices
Application Number
9/654603
Publication Number
6752966 (B1)
Application Date
September 1, 2000
Publication Date
June 22, 2004
Inventor
David Chazan
Palo Alto
CA, US
Agent
Donald R McKenna
US
Assignee
Caliper Life Sciences
CA, US
IPC
B01L 3/00
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