06741329 is referenced by 15 patents and cites 5 patents.

An illumination intensity adjustment device includes a plurality of blades disposed in the projection beam so as to cast half-shadows extending across the illumination field. The blades can be selectively rotated to increase their width perpendicular to the projection beam to control uniformity.

Title
Lithographic apparatus and device manufacturing method
Application Number
10/235854
Publication Number
6741329 (B2)
Application Date
September 6, 2002
Publication Date
May 25, 2004
Inventor
Markus Franciscus Antonius Eurlings
Tilburg
US
Noud Jan Gilissen
Eindhoven
US
Erik Roelof Loopstra
Heeze
US
Johannes Hubertus Josephina Moors
Helmond
US
Martinus Hendrikus Antonius Leenders
Rotterdam
US
Agent
Pillsbury Winthrop
US
Assignee
ASML Netherlands
US
IPC
G03B 27/42
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