06740604 is referenced by 74 patents and cites 3 patents.

A method of separating two layers of material from one another in such a way that the two separated layers of material are essentially fully preserved. An interface between the two layers of material at which the layers of material are to be separated, or a region in the vicinity of the interface, is exposed to electromagnetic radiation through one of the two layers of material. The electromagnetic radiation is absorbed at the interface or in the region in the vicinity of the interface and the absorbed radiation energy induces a decomposition of material at the interface.

Title
Method of separating two layers of material from one another
Application Number
10/324848
Publication Number
6740604 (B2)
Application Date
December 20, 2002
Publication Date
May 25, 2004
Inventor
Robert Handschuh
Garching/alz
US
Roman Dimitrov
München
US
Martin Brandt
München
US
Martin Stutzmann
Erding
US
Oliver Ambacher
Neufahrn
US
Michael Kelly
Freising
US
Agent
Ralph E Locher
US
Werner H Stemer
US
Laurence A Greenberg
US
Assignee
Siemens Aktiengesellschaft
US
IPC
H01L 21/26
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