06738145 is referenced by 24 patents.
An optical fiber pressure sensor having a base layer
with an optical fiber hole, a fiber stop layer
and, optionally, an etch stop layer
The fiber stop layer optionally has a fiber stop hole
that is smaller than the optical fiber
A diaphragm cap layer
is bonded to the fiber stop layer
The diaphragm cap layer
has a diaphragm
spaced apart from the optical fiber. The optical fiber and diaphragm form an Etalon that changes cavity length with applied pressure. Optionally, the device is made almost entirely of silicon, and so has reduced mechanical stress problems caused by thermal expansion mismatches. This allows the present sensor to be used in high temperature environments such as internal combustion engines.