06738145 is referenced by 24 patents.

An optical fiber pressure sensor having a base layer

20

with an optical fiber hole, a fiber stop layer

28

and, optionally, an etch stop layer

24.

The fiber stop layer optionally has a fiber stop hole

33

that is smaller than the optical fiber

22.

A diaphragm cap layer

32

is bonded to the fiber stop layer

28.

The diaphragm cap layer

32

has a diaphragm

34

spaced apart from the optical fiber. The optical fiber and diaphragm form an Etalon that changes cavity length with applied pressure. Optionally, the device is made almost entirely of silicon, and so has reduced mechanical stress problems caused by thermal expansion mismatches. This allows the present sensor to be used in high temperature environments such as internal combustion engines.

Title
Micromachined, etalon-based optical fiber pressure sensor
Application Number
9/814526
Publication Number
6738145 (B2)
Application Date
March 22, 2001
Publication Date
May 18, 2004
Inventor
Dan A Steinberg
Blacksburg
VA, US
Don E Leber
Shawsville
VA, US
David W Sherrer
Blacksburg
VA, US
Agent
Jonathan D Baskin
US
Niels Haun
US
Assignee
Shipley Company L L C
MA, US
IPC
G01B 9/02
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