06726372 is referenced by 4 patents.

A 2-dimensional optical fiber array having stacked sticks with fibers disposed between the sticks. The sticks are made by directional dry etching. The shape of the sticks is defined by a lithographic mask. Each stick has notches for holding the optical fibers. Since the sticks are defined by a lithographic mask, the fibers are accurately located in the 2-D array. In a alternative embodiment, the sticks are made by dry etching holes in a wafer, and then cleaving the wafer into sticks. To make the array. Fibers are disposed between the sticks and the sticks are reassembled so that cleaved surfaces are rejoined. Also, double-sided sticks can be made from a wafer having an etch stop layer. Directional dry etching is performed from both sides of the wafer.

Title
2-Dimensional optical fiber array made from etched sticks having notches
Application Number
9/615101
Publication Number
6726372 (B1)
Application Date
July 13, 2000
Publication Date
April 27, 2004
Inventor
Mindaugas F Dautartas
Blacksburg
VA, US
Dan A Steinberg
Blacksburg
VA, US
David W Sherrer
Blacksburg
VA, US
Agent
Jonathan D Baskin
US
Niels Haun
US
Assignee
Shipley±Company L L C
MA, US
IPC
G02B 6/36
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