06710908 is referenced by 490 patents and cites 3 patents.

Among other things, a cavity having a cavity dimension is configured so that the cavity dimension changes in response to electrostatic forces applied to the cavity, and at least two electrical structures are configured to apply electrostatic forces in the vicinity of the cavity, the electrical structures being independently controllable.

Title
Controlling micro-electro-mechanical cavities
Application Number
10/76224
Publication Number
6710908 (B2)
Application Date
February 13, 2002
Publication Date
March 23, 2004
Inventor
Clarence Chui
Emeryville
CA, US
Mark W Miles
San Francisco
CA, US
Agent
Blakely Sokoloff Taylor & Zafman
US
Assignee
Iridigm Display Corporation
CA, US
IPC
G02B 26/00
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