06632741 is referenced by 226 patents.

A method of self-trimming pattern, includes forming a pattern containing a plurality of regular or irregular features within a first material deposited on a substrate, depositing a conformal layer of second material, and etching the second material to form spacers of the second material along the sidewalls of the features in the first material.

Title
Self-trimming method on looped patterns
Application Number
9/619664
Publication Number
6632741 (B1)
Application Date
July 19, 2000
Publication Date
October 14, 2003
Inventor
Carl J Radens
LaGrangeville
NY, US
Jack A Mandelman
Stormville
NY, US
Louis Lu Chen Hsu
Fishkill
NY, US
Lawrence A Clevenger
LaGrangeville
NY, US
Agent
McGinn & Gibb PLLC
US
Agent
Richard M Ludwin Esq
US
Assignee
International Business Machines Corporation
NY, US
IPC
H01L 21/302
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