06574033 is referenced by 621 patents.

One aspect of the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating an array of first elements, each first element conforming to a first geometry; fabricating at least one array of second elements, each second element conforming to a second geometry; wherein fabricating the arrays comprises selecting a defining aspect of each of the first and second geometries based on a defining characteristic of each of the first and second elements; and normalizing differences in an actuation voltage required to actuate each of the first and second elements, wherein the differences are as a result of the selected defining aspect, the defining characteristic of each of the elements being unchanged.

Title
Microelectromechanical systems device and method for fabricating same
Application Number
10/84893
Publication Number
6574033 (B1)
Application Date
February 27, 2002
Publication Date
June 3, 2003
Inventor
Mark W Miles
San Francisco
CA, US
Clarence Chui
Emeryville
CA, US
Agent
Blakely Sokoloff Taylor & Zafman
US
Assignee
Iridigm Display Corporation
CA, US
IPC
G02B 26/00
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