06573172 is referenced by 172 patents.

Methods are described for fabricating semiconductor devices, in which a tensile film is formed over PMOS transistors to cause a compressive stress therein and a compressive film is formed over NMOS transistors to achieve a tensile stress therein, by which improved carrier mobility is facilitated in both PMOS and NMOS devices.

Title
Methods for improving carrier mobility of PMOS and NMOS devices
Application Number
10/244439
Publication Number
6573172 (B1)
Application Date
September 16, 2002
Publication Date
June 3, 2003
Inventor
Minh Van Ngo
Fremont
CA, US
Angela Hui
Fremont
CA, US
William George En
Milpitas
CA, US
Agent
Eschweiler & Associates
US
Assignee
Advanced Micro Devices
CA, US
IPC
H01L 21/4763
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