06552840 is referenced by 248 patents.

An improved micromechanical device, particularly a micromirror device having improved electrostatic efficiency. A deflectable member comprised of a mirror

302

and an active hinge yoke

306

is suspended address

308

and landing electrodes

312

on a substrate

310

and above upper address electrodes supported above the substrate

310.

The deflectable member is operable to rotate about a torsion hinge axis in response to an electrostatic force between the address electrodes and the deflectable member. The upper address electrodes have a stair stepped shape to narrow a gap between the deflectable member and the upper address electeodes. The gap is narrower near the axis of rotation

810

compared to away from the axis. The stair stepped shape is achieved by embedding a portion of an oxide layer

804

between a thin metal layer

806

making up the upper address electrodes

806,

the active hinge yoke

306,

and the torsion hinges, and a thick metal layer

808

making up the upper address electrodes

806

and the active hinge yoke

306.

Title
Electrostatic efficiency of micromechanical devices
Application Number
9/726861
Publication Number
6552840 (B2)
Application Date
November 30, 2000
Publication Date
April 22, 2003
Inventor
Richard L Knipe
McKinney
TX, US
Agent
Frederick J Telecky Jr
US
Wade James Brady III
US
Charles A Brill
US
Assignee
Texas Instruments Incorporated
TX, US
IPC
G02B 26/00
View Original Source